MICSYS-SA1

Item number: 549-701D

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MICSYS-SA1

Item number: 549-701D

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DescriptionThis high-accuracy non-contact 2D encoder uses image correlation.
The MICSYS-SA1 offers you the following benefits:
  • Simultaneous XY position measurements.
  • Nanometer resolution.
  • Possible to measure on workpiece.
  • You can align it easily.
  • It allows you to carry out minute strain and deflection measurements.

Applications: 
- Nano positioning
- Monitor performance of metrology and manufacturing frames (drift, hysteresis, repeatability)
- Measure deformation

This high-accuracy non-contact 2D encoder uses image correlation.
The MICSYS-SA1 offers you the following benefits:
  • Simultaneous XY position measurements.
  • Nanometer resolution.
  • Possible to measure on workpiece.
  • You can align it easily.
  • It allows you to carry out minute strain and deflection measurements.

Applications: 
- Nano positioning
- Monitor performance of metrology and manufacturing frames (drift, hysteresis, repeatability)
- Measure deformation

Accuracy:
± 100 nm
Linearity (at 20°):
80 nm
Working distance:
10±0,2 mm (including thickness of standard target : 6,1 mm)
Data Update Period:
20Hz
Laser wavelength:
650 nm (Visible) Class 2
Operating temperature and humidity:
Detector: 15-25°C, I/F unit: 0-40°C, 20-80% RH (Non-considering)
Interface:
RS-232C
Standard accessories:
Standard target, Sample software for data correlation (on CD-ROM)
Power supply:
AC100-240V 45W 50/60Hz
Storage temperature and humidity range:
-10-50°C / 85%RH (Non-condensing)